Wafer Holder #CR200A-02B3-H-XF
Capacity: 25 Overall Size: 234mm x 203mm x 219mm D1 Dimension – distance from the Hshaped end surface to the center line of the first pocket (SEMI Std): 25.4mm Pocket Spacing – The distance between pocket center lines: 6.35mm Pocket Flat – The width of the pocket at its narrowest distance: 2.0mm • H-shaped end for equipment interface. • E-shaped handle on end wall. • Wash slots in side walls. • Excellent heat resistance and rigidity. • Improved predictability of wafer location in the horizontal plane. Material Description BISHOP-3 is a conductive hi g h performance resin that provides excellent heat resistance for long periods, chemical resistance and dimensional stability. Extremely low outgassing.